Glumac was the prime contract holder on the project design with this confidential California-based semiconductor client, which had the need to design and build an additional 8,000+ sf of Class 1 bay and chase cleanroom space to increase their production capability. Besides adding new bay and chase space, the design included adding a significant amount of utility infrastructure to support increased production. The added utility infrastructure capacity was a combination of new systems and a retrofitting of existing systems.

The new CL1 bay and chase facility was adjacent to an operational cleanroom facility and all work had to be done with no impact to existing operations. Due to the high level of planning and coordination, the team was successful in the “no unplanned outage” metric.

The new production facility was designed in a 40-year old facility, adjacent to an existing production area that had severe space constraints and required significant seismic upgrades.

Utility infrastructure (new and upgraded) included:

• (4) Exhaust systems, including exhaust abatement
• Waste streams, including acid waste neutralization
• Mechanical Systems
  • Make-up air, with b=very tight temperature and
    humidification control
  • Chilled water systems – primary, secondary and tertiary
  • Heating water systems
• Process systems
  • Ultra-pure water
  • Inert gases
  • Specialty gases
  • CDA, PV and PCW
• Electrical Systems
  • Upgraded site service
  • New 480V, 415V and 230V distribution systems
  • Tie in new services with existing services
  • Generator systems
  • UPS systems